Available base flow range scales for individual gas control channels (any combination of 2 to 6 channels)*:
- 50 SCCM—100 SCCM
- 50 SCCM—200 SCCM
- 50 SCCM—500 SCCM
- 50 SCCM—1 SLPM
- 50 SCCM—2 SLPM
- 50 SCCM—5 SLPM
- 100 SCCM—10 SLPM
- 200 SCCM—20 SLPM
- 500 SCCM—50 SLPM
- 1SLPM—100 SLPM
Accuracy at calibration conditions for individual gas control channels:
- Gas control channels with full scale ranges from 100 SCCM to 20 SLPM: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Gas control channels with full scale ranges from 50 SLPM to 100 SLPM: ±0.8% of reading and ±0.2% of full scale
Repeatability (2σ) for individual gas control channels:
- Gas control channels with full scale ranges from 100 SCCM to 20 SLPM: ±(0.1% of reading + 0.02% of full scale)
- Gas control channels with full scale ranges from 50 SLPM to 100 SLPM: ±(0.2% of reading + 0.02% of full scale)
Typical control response time for individual gas control channels:
- As fast as 25 ms; flow rate, gas species, and back-pressure dependent
- Proprietary, matched-tuning procedure performed on each MFC according to the application parameters
*Custom ranges and alternate units of measure are available at no extra charge, however density based, true-mass units of measure are not possible at this time (e.g. lbs/hr, kg/min, etc.)